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Publicaciones de solicitudes de patente de los últimos 60 días/Applications published in the last 60 days
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A SEPARATOR FOR ALKALINE WATER ELECTROLYSIS

Publication No.:  AU2024407460A1 06/11/2025
Applicant: 
AGFA GEVAERT NV
AGFA-GEVAERT NV
AU_2024407460_PA

Absstract of: AU2024407460A1

A catalyst coated separator for alkaline water electrolysis (1) comprising a porous support (100) and on at least side of the support, in order: - an optional porous polymer layer (200), - a non-porous alkali-stable polymer layer (300), and - a catalyst layer (400).

POWER SYSTEM, CONTROL DEVICE, AND CONTROL METHOD

Publication No.:  AU2024244811A1 06/11/2025
Applicant: 
ENEOS CORP
ENEOS CORPORATION
AU_2024244811_PA

Absstract of: AU2024244811A1

Provided is a configuration capable of improving the operation rate of a hydrogen production device for producing hydrogen using power supplied from multiple power sources using different renewable energies. A power system 1 according to one embodiment of the present disclosure comprises: a hydrogen production device 41 that produces hydrogen using power supplied from different types of renewable energy generators 21, 31; and an information processing device 71 that causes power to be supplied to the hydrogen production device 41 from a renewable energy generator, the output of which is reduced, from among the renewable energy generators 21, 31.

ELECTRODE CATALYST FOR WATER ELECTROLYSIS AND METHOD FOR PRODUCING SAME

Publication No.:  WO2025230304A1 06/11/2025
Applicant: 
KOREA ELECTRIC POWER CORP [KR]
RESEARCH \uFF06 BUSINESS FOUNDATION SUNGKYUNKWAN UNIV [KR]
\uD55C\uAD6D\uC804\uB825\uACF5\uC0AC,
\uC131\uADE0\uAD00\uB300\uD559\uAD50\uC0B0\uD559\uD611\uB825\uB2E8
WO_2025230304_A1

Absstract of: WO2025230304A1

The present invention relates to an electrode catalyst for water electrolysis and a method for producing same, and provides an electrode catalyst for water electrolysis and a method for producing same, the electrode catalyst comprising: a support composed of two-dimensional structured MXene; and a hetero-joined transition metal compound located on the support, wherein the transition metal compound employs a phosphide of two or more types of metals selected from the group consisting of nickel, iron, molybdenum, cobalt, and tungsten, so that the electrode catalyst, compared with conventional commercial catalysts, exhibits improved driving stability and increased electrochemical activity through an increased surface area of the catalyst.

BATTERY SYSTEM COMPRISING CELL STRUCTURE FOR SOLID OXIDE CELL, SEALING STRUCTURE APPLIED THERETO, AND MANUFACTURING METHODS THEREFOR

Publication No.:  WO2025230139A1 06/11/2025
Applicant: 
CERMOTECH CO LTD [KR]
(\uC8FC)\uC368\uBAA8\uD14D
WO_2025230139_PA

Absstract of: WO2025230139A1

A battery system comprising a cell structure for a solid oxide cell, a sealing structure applied thereto, and manufacturing methods therefor are disclosed. The disclosed battery system comprising a cell structure for a solid oxide cell may comprise a stack structure, wherein the stack structure can include: a first separation plate; a second separation plate spaced apart from the first separation plate; a cell structure for a solid oxide cell, which is disposed between the first and second separation plates and comprises a fuel electrode corresponding to an anode, an air electrode corresponding to a cathode, and an electrolyte layer disposed between the fuel electrode and the air electrode; an air electrode current collector disposed between the cell structure and the second separation plate; a first sealing gasket disposed between the first and second separation plates so as to encompass the outer surface of the cell structure; and a second sealing gasket disposed between the first and second separation plates so as to encompass the outer surface of the air electrode current collector.

RUTHENIUM-NICKEL FOAM CATALYST COMPOSITE, PREPARATION METHOD THEREFOR, AND HYDROGEN EXTRACTION SYSTEM USING SAME

Publication No.:  WO2025230390A1 06/11/2025
Applicant: 
POSTECH RES & BUSINESS DEV FOUND [KR]
\uD3EC\uD56D\uACF5\uACFC\uB300\uD559\uAD50 \uC0B0\uD559\uD611\uB825\uB2E8
WO_2025230390_A1

Absstract of: WO2025230390A1

A ruthenium-nickel foam catalyst composite, a preparation method therefor, and a hydrogen extraction system (10) using same are disclosed. Specifically, provided is the method for preparing a catalyst composite used for ammonia decomposition, comprising the steps of: (a) making a porous support, which is in the form of a three-dimensional structure having pores and includes a first metal, come into contact with an acidic aqueous solution so as to pretreat the porous support; (b) preparing a second metal precursor aqueous solution comprising water and a second metal precursor that includes a second metal; and (c) using the pretreated porous support and the second metal precursor aqueous solution so as to support a catalyst including the second metal on a part or all of the surface of the porous support, thereby preparing a catalyst composite. The present invention provides a low-loading noble metal catalyst by maximizing the utilization of supported noble metals through selective adsorption of Ru metal.

REFORMER INTEGRATED GASIFICATION TECHNOLOGY (RIG)

Publication No.:  WO2025229398A1 06/11/2025
Applicant: 
TECHNIP ENERGIES FRANCE [FR]
TECHNIP ENERGIES FRANCE
WO_2025229398_A1

Absstract of: WO2025229398A1

There is described a hydrogen production system comprising: a gasification sub-system to produce a syngas stream from a biomass and/or refuse derived fuel feed stream; and a steam methane reformer (SMR) sub-system to produce an SMR syngas stream from a hydrocarbon feed, and to produce a low carbon hydrogen final product by integrating the syngas stream from the gasification sub-system and the SMR syngas stream.

CONTROL OF AN ELECTROLYSIS SYSTEM FOR PRODUCING HYDROGEN AND OXYGEN BY ELECTROLYSING WATER

Publication No.:  EP4643430A1 05/11/2025
Applicant: 
SIEMENS ENERGY GLOBAL GMBH & CO KG [DE]
Siemens Energy Global GmbH & Co. KG
CN_120836126_PA

Absstract of: AU2024318321A1

The invention relates to an electrolysis system (10) comprising a plurality of electrolysis devices (34, 36) which are connected to a power supply line (30), the electrolysis devices (34, 36) having a power supply unit (38, 40) and an electrolysis module (12, 14, 16, 18, 20, 22, 24, 26) coupled to the power supply unit, the power supply units of the electrolysis devices comprising a transformer (42, 44, 46, 48) and a rectifier unit (50, 52, 54, 56, 58, 60, 62, 64), the transformer having a primary winding (66, 68, 70, 72) and a secondary winding (74, 76, 78, 80, 82, 84, 86, 88) connected to an AC voltage side of the rectifier unit. According to the invention, the primary winding of the transformer of at least a first of the electrolysis devices (40) is designed to be adjustable in stages, and the rectifier unit of said electrolysis device is designed to be operated in an uncontrolled manner, the rectifier unit of the power supply unit of at least a second of the electrolysis devices being designed to be operated in a controlled manner depending on the electrical energy that can be provided by the energy source.

電解装置

Publication No.:  JP2025165583A 05/11/2025
Applicant: 
株式会社デンソー
JP_2025165583_PA

Absstract of: JP2025165583A

【課題】内側領域の温度上昇を抑制することができる、電解装置を提供すること。【解決手段】電解質層と、第1電極21と、第2電極と、第1流路と、を備えた電解セルと、第2流路と、第1電極に当接すると共に第1流路を形成する流路形成導体5と、を有し、流路形成導体5を介して第1電極21と第2電極との間に電圧を印加することで、反応流体Fを電気分解して、水素を生成するよう構成された、電解装置1。第1面の法線方向Zから見て、第1電極21を、第1電極21の外周端辺を含む外周領域A1と、外周領域A1の内側の内側領域A2とに分け、内側領域A2の外形は、第1電極21の外形の相似形であって、内側領域A2の面積を第1電極21の面積の半分とし、電解セルにおける電気分解反応に伴う単位面積当たりの吸熱量を吸熱密度としたとき、外周領域A1における吸熱密度の平均値よりも、内側領域A2における吸熱密度の平均値の方が大きい。【選択図】図2

MEMBRANE, MEMBRANE ELECTRODE ASSEMBLY, AND WATER ELECTROLYSIS DEVICE

Publication No.:  EP4644122A1 05/11/2025
Applicant: 
INST OF SCIENCE TOKYO [JP]
NIPPON KAYAKU KK [JP]
INSTITUTE OF SCIENCE TOKYO,
Nippon Kayaku Kabushiki Kaisha
EP_4644122_PA

Absstract of: EP4644122A1

A membrane having excellent radical durability and low gas permeability, a membrane electrode assembly including the membrane, and a water electrolysis apparatus are provided. A membrane having a laminated structure including a layer B1, a layer A, and a layer B2 in this order, in which the layer A contains a hydrocarbon-based polymer (a) which has an ionic group and may be fluorine-substituted, and each of the layers B1 and B2 contains a perfluoro-carbon polymer (b) having an ionic group.

COMPOSITE DIAPHRAGM FOR HYDROGEN PRODUCTION BY ALKALINE ELECTROLYZED WATER, AND PREPARATION METHOD FOR COMPOSITE DIAPHRAGM

Publication No.:  EP4644588A1 05/11/2025
Applicant: 
HUA XIA HYDROGEN TECH XIAMEN CO LTD [CN]
Hua Xia Hydrogen Technology (Xiamen) Co., Ltd
EP_4644588_A1

Absstract of: EP4644588A1

The present invention provides an improved composite diaphragm for hydrogen production by alkaline electrolysis water. A thermally induced phase separation method is used for preparation, the process is simple, large-scale and large-area stable production can be realized, and the prepared composite diaphragm has high hydrophilicity and high mechanical strength, can tolerate high temperature (90-160°C) and high-concentration alkali liqid, and is an excellent diaphragm for an alkaline electrolytic cell for water electrolysis.

ORGANIC-INORGANIC COMPOSITE SEPARATOR FOR PRODUCTION OF HYDROGEN BY ALKALINE WATER ELECTROLYSIS, AND PREPARATION METHOD THEREFOR

Publication No.:  EP4644587A1 05/11/2025
Applicant: 
HUA XIA HYDROGEN TECH XIAMEN CO LTD [CN]
Hua Xia Hydrogen Technology (Xiamen) Co., Ltd
EP_4644587_PA

Absstract of: EP4644587A1

The present invention provides an improved organic-inorganic composite diaphragm for hydrogen production by alkaline water electrolysis, and a preparation method therefor. An organic polymer resistant to high temperature and concentrated alkali is selected; a polar polymer and a soluble metal salt are introduced into a diaphragm-forming solution; an aqueous alcohol solution containing ions capable of precipitating the metal salt in the diaphragm-forming solution is used as a diaphragm-forming coagulation bath; and the diaphragm and inorganic particles are generated simultaneously to prepare an organic-inorganic composite diaphragm having the inorganic particles uniformly distributed on the surface and the interior of the diaphragm. The organic-inorganic composite diaphragm has few defects, high stability and strong controllability, is used as a diaphragm for hydrogen production by alkaline water electrolysis, and demonstrates a lower electrolysis voltage and very high electrolysis efficiency.

POROUS MONOLITHIC CATALYST WITH CORE-SHELL STRUCTURE, AND PREPARATION METHOD THEREFOR AND USE THEREOF

Publication No.:  EP4644586A1 05/11/2025
Applicant: 
NINGBO INST MATERIALS TECH & ENG CAS [CN]
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences
EP_4644586_PA

Absstract of: EP4644586A1

The present disclosure discloses an integral catalyst with porous core-shell structure and a preparation method and an application thereof. With a transition metal as active material, a stable bifunctional catalyst capable of performing hydrogen evolution and biomass oxidation at the same time is prepared by epitaxial growth and air calcination; and, the process efficiencies of internal diffusion, external diffusion, adsorption, reaction and desorption of reactive molecules and product molecules and so on can be increased by the porous structure of the catalyst, realizing increase of the catalyst activity.

ENERGY SUPPLY SYSTEM FOR COUPLING TO A WIND TURBINE USED IN ISLAND MODE, AND METHOD FOR SUPPLYING THE WIND TURBINE WITH SOLAR ENERGY

Publication No.:  EP4643012A1 05/11/2025
Applicant: 
SIEMENS ENERGY GLOBAL GMBH & CO KG [DE]
Siemens Energy Global GmbH & Co. KG
CN_120813766_PA

Absstract of: AU2024291100A1

The invention relates to an energy supply system (20) for coupling to a wind turbine (30) used in island mode, wherein the wind turbine (30) is configured to operate an electrolysis system (11) for producing green hydrogen using wind energy, wherein the energy supply system (20) has a solar energy source (21), comprising a photovoltaic module (22) and/or a solar thermal collector (23), which is configured to supply the electrolysis system (21), in particular an enclosure (12) and water-conducting lines of electrolysis units of the electrolysis system (11), with thermal energy in the event of the absence of wind energy. The invention also relates to a corresponding method for supplying solar energy to a wind turbine (30) used in island mode.

PARTIAL LOAD OPERATION OF ELECTROLYZER

Publication No.:  EP4642959A1 05/11/2025
Applicant: 
SIEMENS ENERGY GLOBAL GMBH & CO KG [DE]
Siemens Energy Global GmbH & Co. KG
CN_120731295_PA

Absstract of: AU2024307301A1

A method and arrangement of performing electrolysis by an electrolyzer includes an operational mode and a partial operational mode. During the operational mode operational power from a main power source (202) to a first (808) and second set of stacks (806). In response to detecting a power insufficient for the first and the second set of stacks (806) to perform electrolysis without impurities, the electrolyzer is set to a partial operational mode, wherein the first set of stacks (808) perform electrolysis without impurities and the second set of stacks (806) do not perform electrolysis.

Bipolar plate and electrodes assembly and method for generating a bipolar plate and electrodes assembly and electrolyser unit adapted for electrolysing water into hydrogen and oxygen.

Publication No.:  DK202430166A1 05/11/2025
Applicant: 
GREEN HYDROGEN SYSTEMS AS [DK]
Green Hydrogen Systems A/S
WO_2025219328_PA

Absstract of: DK202430166A1

A bipolar plate and electrodes assembly where the bipolar plate is connected to an electrode through a number of distance units is thus suggested whereby the distance units are singular, and that further, between each singular distance unit and at least one of the bipolar plate and the electrode a fusion zone is/are provided. The invention also comprises a method for generating a bipolar plate and electrodes assembly. Further an electrolyser adapted for electrolysing water into oxygen and hydrogen, is provided, whereby the electrolyser comprises a cell stack having alternatingly a diaphragm and a bipolar plate and electrode assembly and the assembly is comprised of a number of singular distance units interposed between and interconnecting bipolar plate and respective cathode and anode electrode, which distance units are adapted to be generated by way of one or more distance unit controlled generators during an assembly and fusion process.

ADHESIVE-FIXED ELECTROLYSIS MODULE

Publication No.:  EP4644584A2 05/11/2025
Applicant: 
TECHCROSS INC [KR]
Techcross Inc
EP_4644584_PA

Absstract of: EP4644584A2

The present invention is an adhesive-fixed electrolysis module comprising a single stack, the single stack having a separator, a pair of bipolar plates, a pair of gaskets, a pair of diffusion layers, a pair of electrodes, and a cell frame, wherein the bipolar plates, the gaskets, the diffusion layers, and the electrodes are sequentially arranged on the cathode and anode sides, respectively, with respect to the separator, forming a symmetrical structure, wherein the separator, the bipolar plates, the gaskets, the diffusion layers, and the electrodes are stacked in a zero-gap manner within the cell frame, and wherein the bipolar plates are adhered and fixed to the cell frame using an adhesive, thereby simplifying product assembly and reducing assembly costs compared to a single stack fixing method using welding, riveting, bolting, etc. between conventional parts.

A PLASMA-CATALYTIC GLIDING DISCHARGE SYSTEM FOR THE DECOMPOSITION OF AMMONIA AND USE THEREOF

Publication No.:  EP4642571A1 05/11/2025
Applicant: 
POLITECHNIKA WARSZAWSKA [PL]
Politechnika Warszawska
PL_444277_A1

Absstract of: WO2024205436A1

The object of the invention is a plasma-catalytic system for the decomposition of ammonia in gliding discharge plasma characterized in that it contains a gliding discharge reactor containing at least one catalytic bed (5) containing a metallic catalyst selected from a group including Ni and Co in an amount in a range of 2-20% by weight deposited on the Al2O3 substrate. Another object of the invention is the plasma-catalytic system of the invention for use in the decomposition of ammonia, characterized in that the mixture to be decomposed contains at least 60% ammonia and at least 40% another component selected from nitrogen and hydrogen with a flow rate in a range of 160-200 Ndm3/h.

DIRECT COATING OF ANION EXCHANGE MEMBRANES WITH CATALYTICALLY ACTIVE MATERIAL

Publication No.:  EP4645482A1 05/11/2025
Applicant: 
EVONIK OPERATIONS GMBH [DE]
Evonik Operations GmbH
EP_4645482_PA

Absstract of: EP4645482A1

Die Erfindung befasst sich mit dem Beschichten von Anionenaustauschmembranen (AEM) mit katalytisch aktiven Material. Die so erhaltenen CCM werden in elektrochemischen Zellen eingesetzt, insbesondere zur alkalischen Wasserelektrolyse. Der Erfindung lag die Aufgabe zu Grunde, ein Verfahren zur Herstellung einer CCM durch Direktbeschichtung anzugeben, welches die notwendige Ebenheit der AEM erhält und möglichst ohne die Verwendung von verlorenen Folien und ohne CMR-Stoffe auskommt. Weiter soll die Quellung minimiert werden. Auch soll das Verfahren mit fluorfreien lonomeren durchführbar sein. Die Erfindung beruht auf der Erkenntnis, dass die Zugabe bestimmter organischer Substanzen dazu führt, dass die AEM nicht oder lediglich geringfügig quillt (Antiquellmittel). Überraschenderweise hat sich herausgestellt, dass sich als Antiquellmittel geeignete Substanzen anhand ihres Löslichkeits-verhaltens identifizieren lassen, genauer gesagt, anhand ihrer Hansen-Parameter.

SYSTEM AND METHOD FOR PRODUCING HYDROGEN FROM FEEDSTOCK

Publication No.:  EP4642880A1 05/11/2025
Applicant: 
SYNTHEC FUELS GMBH [DE]
Synthec Fuels GmbH
DE_102022134996_PA

Absstract of: WO2024141564A1

The present disclosure relates to a system for producing hydrogen from feedstock and a method thereof. The system comprises a first chamber adapted to thermally decompose the feedstock, and a second chamber adapted to receive a first portion of the gaseous stream and to receive a first portion of the solids stream to form a reactants combination. The second chamber adapted to partially react the reactants combination with steam to produce a product gas. The system further comprises a third chamber adapted to receive a second portion of the gaseous stream and adapted to receive a second portion of the solids stream to form a combustibles combination. The third chamber adapted to at least partially combust the combustibles combination to produce process heat for the first chamber and/or the second chamber. The system further comprises a controller adapted to adjust the composition of the reactants combination and of the combustibles combination.

LOW-CAPACITY HIGH-PRESSURE ELECTROLYSIS DEVICE

Publication No.:  EP4642951A1 05/11/2025
Applicant: 
HYDRO GEN BV [NL]
HYDRO-GEN BV
KR_20250129009_PA

Absstract of: CN120390829A

The present invention provides a small high-voltage electrolyzer for generating hydrogen and oxygen, the small high-voltage electrolyzer comprising: one or more cells each comprising a plurality of high-voltage electrolysis cells wherein the electrolysis cells of the respective cells are electrically connected in series; and a central electrolyte header functionally connected to each of the electrolytic cells for supplying a liquid electrolyte to the cell; a central hydrogen header connected to each of the electrolytic cells for discharging the generated hydrogen from the cells; a central oxygen header connected to each of the electrolytic cells for discharging the generated oxygen from the cells; the direct-current power supply is used for supplying power to each unit of the electrolytic bath which is connected in series; wherein the cells of the electrolytic cells connected in series are electrically connected in parallel.

CATALYST FOR WATER ELECTROLYSIS USING FLUORINE DOPED TIN OXIDE SUPPORT AND METHOD FOR MANUFACTURING THE SAME

Publication No.:  KR20250157901A 05/11/2025
Applicant: 
한국과학기술연구원한국기초과학지원연구원
KR_20250157901_PA

Absstract of: KR20250157901A

본 발명은 담지체를 준비하는 단계; 담지체에 불소를 도핑하는 단계; 및 불소가 도핑된 담지체의 표면에 금속 입자 촉매를 형성하는 단계;를 포함하는 불소가 도핑된 담지체를 이용한 수전해용 촉매의 제조 방법과 이로부터 제조된 수전해용 촉매에 관한 것이다.

DIRECT COATING OF ANION EXCHANGE MEMBRANES WITH CATALYTICALLY ACTIVE MATERIAL

Publication No.:  KR20250157972A 05/11/2025
Applicant: 
EVONIK OPERATIONS GMBH [DE]
\uC5D0\uBCF4\uB2C9 \uC624\uD37C\uB808\uC774\uC158\uC2A4 \uAC8C\uC5E0\uBCA0\uD558
KR_20250157972_PA

Absstract of: CA3271574A1

The invention relates to the coating of anion exchange membranes (AEM) with catalytically active substances. The CCM thus obtained are used in electrochemical cells, especially for alkaline water electrolysis. It was an object of the invention to specify a process for producing a CCM by direct 5 coating which maintains the necessary planarity of the AEM and ideally avoids the use of lost films and eschews CMR substances. Swelling shall also be minimized. The process shall also be performable with fluorine-free ionomers. The invention is based on the finding that the addition of certain organic substances has the result that the AEM swells only to a small extent, if at all (antiswelling agent). It has surprisingly been found that substances suitable as antiswelling agents 10 are identifiable by their solubility behaviour, more particularly by their Hansen parameters. Fig. 4 accompanies the abstract

水素発生装置

Publication No.:  JP2025165571A 05/11/2025
Applicant: 
株式会社神鋼環境ソリューション
JP_2025165571_PA

Absstract of: JP2025165571A

【課題】熱交換器を用いた水の温度調整での調整精度を高めることが可能な水素発生装置を提供し、水素発生装置での水素ガスの製造効率を向上させる。【解決手段】水を電気分解して水素を発生させる電解装置と、電解装置を通じて水が循環する水循環経路と、水循環経路でイオンを除去するイオン交換器と、水循環経路の水温を調節する水温調節装置とを有し、水循環経路がイオン交換器通過と電解装置との間で分岐した後に合流し、水温調節装置は、電解装置が排出する水よりも低温の水をイオン交換器に供給し、該水よりも高温の水を電解装置に供給すべく、分岐点から合流点までの間に熱交換器を有し、合流点で合流する水に温度差を設けるよう構成され、合流する水の割合を調整して電解装置に供給する水の温度を調整する温度調整弁を有している水素発生装置を提供する。【選択図】 図3

ELECTROLYSIS SYSTEM COMPRISING AN ELECTROLYSIS PLANT AND A RENEWABLE ENERGY PLANT AND METHOD FOR CONTROLLING AN ELECTROLYSIS SYSTEM

Publication No.:  EP4643431A1 05/11/2025
Applicant: 
SIEMENS ENERGY GLOBAL GMBH & CO KG [DE]
Siemens Energy Global GmbH & Co. KG
CN_120693765_PA

Absstract of: AU2024301470A1

The present invention relates to an electrolysis system (100) comprising a renewable power generation plant (1), an electrolysis plant (3), a transformer station (27) and an AC bus bar (5), wherein the renewable power generation plant (1) is connected to the public electricity grid at a point of connection (POC) via the AC bus bar (5) and comprises a power plant controller (7) and a self-controlled converter (9) that is connected to the AC bus bar (5). The electrolysis plant (3) comprises an electrolysis active power controller (11) and a converter arrangement (13) that is connected to the AC bus bar (5), and wherein the electrolysis active power controller (11) is configured for controlling active power (P) of the electrolysis plant (3) at the AC bus bar (5) and the power plant controller (7) is configured for controlling reactive power (Q) at the point of connection (POC).

水電解システム、水電解方法、および、コンピュータプログラム

Nº publicación: JP2025165009A 04/11/2025

Applicant:

株式会社豊田中央研究所

JP_2025165009_PA

Absstract of: JP2025165009A

【課題】 水電解システムにおいて、目標露点となっている水素を短時間で製造する技術を提供する。【解決手段】 水電解システムは、水の電気分解によって水素を生成する水電解装置と、水電解装置に接続され、水電解装置によって生成された水素と水とを含むガスが流れる流路と、流路に接続され、水電解装置から供給されるガスを収容する収容部と、収容部に供給されるガスを冷却する冷却部と、収容部の内部の温度を検出する温度検出部と、収容部の内部の圧力を変更する圧力変更部と、収容部の内部の露点が目標露点となるための収容部の内部の温度と圧力との関係を示す情報と、温度検出部によって検出された温度と、を用いて目標圧力を推定し、収容部の内部の圧力が目標圧力になるように、圧力変更部を制御する制御部と、を備える。【選択図】 図1

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